TY  - CONF
AU  - Orji, Ndubuisi
AU  - Dixson, Ronald
AU  - Vladar, Andras
AU  - Postek, Michael
C2  - SPIE NanoScience   Engineering: Instrumentation, Metrology, and Standards for Nanomanufacturing, 
Optics, and Semiconductors V, San Diego, CA
DA  - 2011-09-30
DO  - https://doi.org/10.1117/12.894416
LA  - en
M1  - 8105
PB  - SPIE NanoScience   Engineering: Instrumentation, Metrology, and Standards for Nanomanufacturing, 
Optics, and Semiconductors V, San Diego, CA
PY  - 2011
TI  - Strategies for Nanoscale Contour Metrology using Critical Dimension Atomic Force Microscopy
ER  -