TY  - JOUR
AU  - Foldyna, Martin
AU  - Germer, Thomas
AU  - Bergner, Brent
AU  - Dixson, Ronald
C2  - Thin Solid Films
DA  - 2010-12-10
LA  - en
M1  - 519
PB  - Thin Solid Films
PY  - 2010
TI  - Generalized ellipsometry of artificially designed line width roughness
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906239
ER  -