TY  - JOUR
AU  - Kramar, John
AU  - Dixson, Ronald
AU  - Orji, Ndubuisi
C2  - Measurement Science & Technology
DA  - 2010-12-21
LA  - en
PB  - Measurement Science & Technology
PY  - 2010
TI  - Scanning Probe Microscope Dimensional Metrology at NIST
ER  -