TY  - CONF
AU  - Dixson, Ronald
AU  - Orji, Ndubuisi
AU  - Potzick, James
AU  - Fu, Joseph
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Smith, S
AU  - Walton, Anthony
C2  - Proceedings of SPIE, Monterey, CA
DA  - 2007-10-01
LA  - en
M1  - 6730
PB  - Proceedings of SPIE, Monterey, CA
PY  - 2007
TI  - Photomask Applications of Traceable Atomic Force Microscope Dimensional Metrology at NIST
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823242
ER  -