TY  - CONF
AU  - Kopanski, Joseph
AU  - Vartanian, Victor
AU  - Mancevski, Vladimir
AU  - Rack, Phillip
AU  - Ilona, 
AU  - Bresin, Matthew
C2  - Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA
DA  - 2010-08-10
LA  - en
M1  - 7767
PB  - Instrumentation, Metrology, and Standards for Nanomanufacturing IV, Proceedings of SPIE Volume: 7767, San Diego, CA
PY  - 2010
TI  - Conductive Carbon Nanotubes for Semiconductor Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906923
ER  -