TY - JOUR AU - Rykaczewski, Konrad AU - Hildreth, Owen AU - Wong, Ching AU - Fedorov, Andrei AU - Scott, John C2 - Nano Letters DA - 2011-06-28 LA - en M1 - 11 PB - Nano Letters PY - 2011 TI - Guided three-dimensional catalyst folding during Metal assisted Chemical Etching of Silicon UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=908006 ER -