TY  - JOUR
AU  - Rykaczewski, Konrad
AU  - Hildreth, Owen
AU  - Wong, Ching
AU  - Fedorov, Andrei
AU  - Scott, John
C2  - Advanced Materials
DA  - 2011-02-01
LA  - en
M1  - 23
PB  - Advanced Materials
PY  - 2011
TI  - Directed 2D-to-3D pattern transfer method for controlled fabrication of topologically complex three- dimensional nanostructures in silicon
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=906590
ER  -