TY  - CONF
AU  - Secula, Erik
AU  - Seiler, David
C2  - Frontiers of Characterization and Metrology for Nanoelectronics: 2015, Dresden, -1
DA  - 2015-04-14
LA  - en
PB  - Frontiers of Characterization and Metrology for Nanoelectronics: 2015, Dresden, -1
PY  - 2015
TI  - Frontiers of Characterization and Metrology for Nanoelectronics: 2015
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918591
ER  -