TY  - CONF
AU  - You, Lin
AU  - Ahn, Jungjoon
AU  - Hitz, Emily
AU  - Michelson, Jonathon
AU  - Obeng, Yaw
AU  - Kopanski, Joseph
C2  - Proceedings of the 28th IEEE International Conference on Microelectronic Test Structures, Phoenix, AZ
DA  - 2015-03-23
LA  - en
PB  - Proceedings of the 28th IEEE International Conference on Microelectronic Test Structures, Phoenix, AZ
PY  - 2015
TI  - Electromagnetic Field Test Structure Chip for Back End of the Line Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918005
ER  -