TY  - SER
AU  - Seiler, David
AU  - Diebold, Alain
AU  - Shaffner, Thomas
AU  - McDonald, Robert
AU  - Zollner, Stefan
AU  - Khosla, Rajinder
AU  - Secula, Erik
C2  - American Institute of Physics, Melville, NY
DA  - 2003-09-30
LA  - en
M1  - 683
PB  - American Institute of Physics, Melville, NY
PY  - 2003
TI  - Characterization and Metrology for ULSI Technology: 2003
ER  -