TY  - SER
AU  - Seiler, David
AU  - Diebold, Alain
AU  - Bullis, W
AU  - Shaffner, Thomas
AU  - McDonald, R.
AU  - Walters, E.
C2  - American Institute of Physics, Melville, NY
DA  - 1998-11-01
LA  - en
M1  - 449
PB  - American Institute of Physics, Melville, NY
PY  - 1998
TI  - Characterization and Metrology for ULSI Technology
ER  -