TY  - SER
AU  - Seiler, David
AU  - Diebold, Alain
AU  - McDonald, Robert
AU  - Garner, C
AU  - Herr, Dan
AU  - Khosla, Rajinder
AU  - Secula, Erik
C2  - American Institute of Physics, Melville, NY
DA  - 2007-09-30
LA  - en
M1  - 931
PB  - American Institute of Physics, Melville, NY
PY  - 2007
TI  - Frontiers of Characterization and Metrology for Nanoelectronics: 2007
ER  -