TY  - SER
AU  - Seiler, David
AU  - Diebold, Alain
AU  - McDonald, Robert
AU  - C., 
AU  - Herr, Dan
AU  - Khosla, Rajinder
AU  - Secula, Erik
C2  - American Institute of Physics, Melville, NY
DA  - 2009-10-05
LA  - en
M1  - 1173
PB  - American Institute of Physics, Melville, NY
PY  - 2009
TI  - Frontiers of Characterization and Metrology for Nanoelectronics: 2009
ER  -