TY  - SER
AU  - Seiler, David
AU  - Diebold, Alain
AU  - Shaffner, Thomas
AU  - McDonald, R.
AU  - Bullis, W
AU  - Smith, P.
AU  - Secula, Erik
C2  - American Institute of Physics, Melville, NY
DA  - 2001-02-01
LA  - en
M1  - 550
PB  - American Institute of Physics, Melville, NY
PY  - 2001
TI  - Characterization and Metrology for ULSI Technology: 2000
ER  -