TY  - SER
AU  - Seiler, David
AU  - Diebold, Alain
AU  - McDonald, Robert
AU  - Ayre, Caroline
AU  - Khosla, Rajinder
AU  - Zollner, Stefan
AU  - Secula, Erik
C2  - American Institute of Physics, Melville, NY
DA  - 2005-09-28
LA  - en
M1  - 788
PB  - American Institute of Physics, Melville, NY
PY  - 2005
TI  - Characterization and Metrology for ULSI Technology: 2005
ER  -