TY - GEN AU - Zhang, Hao AU - Ott, Daniel AU - Song, Jun-Feng AU - Ott, D AU - Chu, Wei C2 - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD DA - 2015-07-14 00:07:00 DO - https://doi.org/10.6028/jres.120.010 LA - en PB - Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD PY - 2015 TI - A simple and fast spline filtering algorithm for surface metrology UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918312 ER -