TY  - ICOMM
AU  - Vorburger, Theodore
AU  - Thomas, 
AU  - Xiaoyu, 
AU  - Song, Jun-Feng
AU  - Soons, Johannes
AU  - Richard, 
C1  - http://www.nist.gov/pml/div683/grp02/upload/nistsurfcalib.pdf
C2  - NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS
DA  - 2014-03-18 00:03:00
LA  - en
PB  - NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS
PY  - 2014
TI  - NIST SURFACE ROUGHNESS AND STEP HEIGHT CALIBRATIONS, Measurement Conditions and Sources of Uncertainty
ER  -