TY - JOUR AU - Savage, N AU - Roberson, S AU - Gillen, John AU - Tarlov, Michael AU - Semancik, Stephen C2 - Analytical Chemistry DA - 2003-09-01 LA - en M1 - 75 PB - Analytical Chemistry PY - 2003 TI - Thermolithographic Patterning of Sol-Gel Metal Oxides on Micro hot plate Sensing Arrays Using Organosilanes ER -