TY  - JOUR
AU  - Bard, A
AU  - Berggren, K
AU  - Wilbur, J
AU  - Gillaspy, John
AU  - Rolston, S
AU  - McClelland, Jabez
AU  - Phillips, William
AU  - Prentiss, M
AU  - Whitesides, G
C2  - Journal of Vacuum Science and Technology B
DA  - 1997-09-01
LA  - en
M1  - 15
PB  - Journal of Vacuum Science and Technology B
PY  - 1997
TI  - Self-Assembled Monolayers Exposed by Metastable Argon and Metastable Helium for Neutral Atom Lithography and Atomic Beam Imaging
ER  -