TY  - CONF
AU  - Grantham, Steven
AU  - Tarrio, Charles
C2  - 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY
DA  - 2009-11-01
LA  - en
M1  - 1173
PB  - 2009 International Conference on Frontiers of Characterization and Metrology for Nanoelectronics, Albany, NY
PY  - 2009
TI  - A Novel Wafer-plane Dosimeter for EUV Lithography
ER  -