TY  - JOUR
AU  - Dagata, John
AU  - Farkas, Natalia
AU  - Ramsier, R
C2  - Journal of Nanoscience and Nanotechnology
DA  - 2010-07-01
LA  - en
M1  - 10
PB  - Journal of Nanoscience and Nanotechnology
PY  - 2010
TI  - High-voltage Nanoimprint Lithography of Refractory Metal Film
ER  -