TY  - CONF
AU  - Orji, Ndubuisi
AU  - Dixson, Ronald
AU  - Bunday, B
AU  - Allgair, J
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXII
, San Jose, CA
DA  - 2008-03-22
LA  - en
M1  - 6922
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XXII
, San Jose, CA
PY  - 2008
TI  - Towards Accurate Feature Shape Metrology
ER  -