TY  - CONF
AU  - Mark, 
AU  - Silver, Richard
AU  - Zhang, Nien
AU  - Zhou, Hui
AU  - Barnes, Bryan
AU  - Ming, Bin
AU  - Vladar, Andras
AU  - Villarrubia, John
C2  - Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA
DA  - 2015-03-19
DO  - https://doi.org/10.1117/12.2175653
LA  - en
M1  - 9424
PB  - Metrology, Inspection, and Process Control for Microlithography XXIX, San Jose, CA
PY  - 2015
TI  - Optimizing Hybrid Metrology: Rigorous Implementation of Bayesian and Combined Regression
ER  -