TY  - CONF
AU  - Tedesco, Joseph
AU  - Gergel-Hackett, Nadine
AU  - Stephey, Laurie
AU  - Hacker, Christina
AU  - Richter, Curt
C2  - Posters and Presentations (CD), McLean, VA
DA  - 2010-04-29
LA  - en
PB  - Posters and Presentations (CD), McLean, VA
PY  - 2010
TI  - Advanced Capacitance Metrology for Nanoscale Device Characterization
ER  -