TY - CONF AU - Fesperman, Ronnie AU - Donmez, M AU - Moylan, Shawn C2 - ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology, Asheville, NC DA - 2010-06-23 LA - en M1 - 49 PB - ASPE 2010 Summer Topical Meeting on Precision Interferometric Metrology, Asheville, NC PY - 2010 TI - Ultra-Precision Linear Motion Metrology UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=905833 ER -