TY - JOUR AU - Morris, Dylan AU - Bahr, David AU - Need, Ryan AU - Anderson, Michael C2 - Sensors and Actuators A-Physical DA - 2010-04-28 LA - en PB - Sensors and Actuators A-Physical PY - 2010 TI - Enhanced actuation and acoustic transduction by pressurization of micromachined piezoelectric diaphragms ER -