TY  - CONF
AU  - Richter, Curt
AU  - Kopanski, Joseph
AU  - Wang, Yicheng
AU  - Afridi, Muhammad
AU  - Zhu, Xiaoxiao
AU  - Ioannou, D.
AU  - Li, Qiliang
AU  - Jiang, Chong
C2  - AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009, Albany, NY
DA  - 2009-10-05
LA  - en
PB  - AIP Conference Proceedings, Frontiers of Characterization and Metrology for Nanoelectronics: 2009, Albany, NY
PY  - 2009
TI  - Advanced Capacitance Metrology for Nanoelectronic Device Characterization
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903268
ER  -