TY  - CONF
AU  - Cizmar, Petr
AU  - Vladar, Andras
AU  - Postek, Michael
C2  - Scanning, Monterey, CA
DA  - 2009-05-22
LA  - en
M1  - 7378
PB  - Scanning, Monterey, CA
PY  - 2009
TI  - Optimization of Accurate SEM Imaging by Use of Artificial Images
ER  -