TY  - CONF
AU  - Landree, E
AU  - Jach, Terrence
AU  - Brady, D
AU  - Karamcheti, A.
AU  - Canterbury, J
AU  - Chism, W
AU  - Diebold, A
C2  - Characterization and Metrology for ULSI Technology Conference, -1
DA  - 2001-01-01
LA  - en
PB  - Characterization and Metrology for ULSI Technology Conference, -1
PY  - 2001
TI  - Characterization of Silicon-Oxynitride Dielectric Thin Films Using Grazing Incidence X-ray Photoelectron Spectroscopy
ER  -