TY  - CONF
AU  - Dixson, Ronald
AU  - Guthrie, William
AU  - Cresswell, Michael
AU  - Allen, Richard
AU  - Orji, Ndubuisi
C2  - Proceedings of SPIE, San Jose, CA
DA  - 2007-04-05
LA  - en
M1  - 6518
PB  - Proceedings of SPIE, San Jose, CA
PY  - 2007
TI  - Single Crystal Critical Dimension Reference Materials (SCCDRM): Process Optimization for the Next Generation of Standards
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823219
ER  -