TY  - JOUR
AU  - Villarrubia, John
AU  - Vladar, Andras
AU  - Ming, Bin
AU  - Kline, Regis
AU  - Sunday, Daniel
AU  - Chawla, Jasmeet
AU  - List, Scott
C2  - Ultramicroscopy
DA  - 2015-07-01
DO  - https://doi.org/10.1016/j.ultramic.2015.01.004
LA  - en
M1  - 154
PB  - Ultramicroscopy
PY  - 2015
TI  - Scanning electron microscope measurement of width and shape of 10 nm patterned lines using a JMONSEL-modeled library
ER  -