TY  - JOUR
AU  - Patrick, Heather
AU  - Attota, Ravikiran
AU  - Barnes, Bryan
AU  - Germer, Thomas
AU  - Stocker, Michael
AU  - Silver, Richard
AU  - Bishop, Michael
C2  - Journal of Microlithography Microfabrication and Microsystems
DA  - 2008-01-02
LA  - en
M1  - 7
PB  - Journal of Microlithography Microfabrication and Microsystems
PY  - 2008
TI  - Optical Critical Dimension Measurement of Silicon Grating Targets Using Back Focal Plane Scatterfield Microscopy
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=841060
ER  -