TY  - CONF
AU  - Kopanski, Joseph
AU  - Afridi, Muhammad
AU  - Jiang, Chong
AU  - Richter, Curt
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Oxnard, CA
DA  - 2009-03-30
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Oxnard, CA
PY  - 2009
TI  - Test Chip to Evaluate Measurement Methods for Small Capacitances
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901503
ER  -