TY  - CONF
AU  - Chen-Mayer, Huaiyu
AU  - Lamaze, George
AU  - Satija, Sushil
C2  - Characterization and Metrology for ULSI Technology 2000:International Conference
, Gaithersburg, MD
DA  - 2001-01-29
LA  - en
M1  - 550
PB  - Characterization and Metrology for ULSI Technology 2000:International Conference
, Gaithersburg, MD
PY  - 2001
TI  - Characterization of BPSG films using Neutron Depth Profiling and Neutron/X-ray Reflectometry
ER  -