TY - JOUR AU - Moffat, Thomas AU - Baker, B AU - Wheeler, Daniel AU - Bonevich, John AU - Edelstein, Monica AU - D, AU - Gan, L AU - Stafford, Gery AU - Chen, P AU - Egelhoff, William AU - Josell, Daniel C2 - Journal of the Electrochemical Society DA - 2002-08-01 LA - en M1 - 149 PB - Journal of the Electrochemical Society PY - 2002 TI - Superconformal Electrodeposition of Silver in Submicrometer Features UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853123 ER -