TY  - CONF
AU  - Patrick, Heather
AU  - Germer, Thomas
AU  - Cresswell, Michael
AU  - Li, Bin
AU  - Huang, Huai
AU  - Ho, Paul
C2  - Proceedings of the SPIE Conference on Optics and Photonics | 2008 |, San Diego, CA
DA  - 2008-06-09
LA  - en
PB  - Proceedings of the SPIE Conference on Optics and Photonics | 2008 |, San Diego, CA
PY  - 2008
TI  - Extraction of trench geometry and linewidth of nanoscale grating targets in (110)-oriented silicon using angle-resolved scatterometry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=842548
ER  -