TY  - CONF
AU  - Patrick, Heather
AU  - Germer, Thomas
AU  - Ding, Yifu
AU  - Hyun, 
AU  - Richter, Lee
AU  - Soles, Christopher
C2  - Proceedings of the SPIE Conference on Alternative Lithographic Technologies, SPIE vol. 7271, 2009., San Jose, CA
DA  - 2009-03-02
LA  - en
PB  - Proceedings of the SPIE Conference on Alternative Lithographic Technologies, SPIE vol. 7271, 2009., San Jose, CA
PY  - 2009
TI  - In situ measurement of annealing-induced line shape decay in nanoimprinted polymers using scatterometry
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901568
ER  -