TY - JOUR AU - Zhu, Xiaoxiao AU - Gu, D. AU - Li, Qiliang AU - Ioannoua, D. AU - Baumgart, H. AU - Suehle, John AU - Richter, Curt C2 - Microelectronic Engineering DA - 2009-09-01 LA - en M1 - 86 PB - Microelectronic Engineering PY - 2009 TI - Silicon Nanowire NVM with High-k Gate Dielectric Stack ER -