TY  - JOUR
AU  - Yarimbiyik, Emre
AU  - Schafft, Harry
AU  - Allen, Richard
AU  - Vaudin, Mark
AU  - Zaghloul, Mona
C2  - Microelectronics Reliability
DA  - 2009-02-19
LA  - en
M1  - 49
PB  - Microelectronics Reliability
PY  - 2009
TI  - Experimental and Simulation Studies of Resistivity of Nanoscale Copper Films
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32595
ER  -