TY  - JOUR
AU  - Barnes, Bryan
AU  - Goasmat, Francois
AU  - Sohn, Martin
AU  - Zhou, Hui
AU  - Vladar, Andras
AU  - Silver, Richard
C2  - Journal of Micro/Nanolithography, MEMS, and MOEMS
DA  - 2015-02-11
DO  - https://doi.org/10.1117/1.JMM.14.1.014001
LA  - en
M1  - 14
PB  - Journal of Micro/Nanolithography, MEMS, and MOEMS
PY  - 2015
TI  - Effects of wafer noise on the detection of 20 nm defects using optical volumetric inspection
ER  -