TY  - CONF
AU  - Cavicchi, Richard
AU  - Suehle, John
AU  - Chaparala, P
AU  - Kreider, Kenneth
AU  - Gaitan, Michael
AU  - Semancik, Stephen
C2  - Proc., Solid-State Sensor and Actuators Workshop, Hilton Head, SC, USA
DA  - 1994-12-31 00:12:00
LA  - en
PB  - Proc., Solid-State Sensor and Actuators Workshop, Hilton Head, SC, USA
PY  - 1994
TI  - Micro-Hotplate Gas Sensor
ER  -