TY  - CONF
AU  - Troccolo, P.
AU  - Mantalas, L.
AU  - Allen, Richard
AU  - Linholm, Loren
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA
DA  - 1991-12-31 00:12:00
LA  - en
M1  - 1464
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), International Society for Optical Engineering, Integrated Circuit Metrology, Inspection, and Process Control V, San Jose, CA, USA
PY  - 1991
TI  - Extending Electrical Measurements to the 0.5-um Regime
ER  -