TY  - CONF
AU  - Villarrubia, John
AU  - Dixon, R.
AU  - Jones, S.
AU  - Lowney, J
AU  - Postek, Michael
AU  - Allen, Richard
AU  - Cresswell, Michael
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII, Santa Clara, CA, USA
DA  - 1999-09-01 00:09:00
LA  - en
M1  - 3677
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE)Integrated Circuit Metrology, Inspection, and Process Control XIII, Santa Clara, CA, USA
PY  - 1999
TI  - Intercomparison of SEM, AFM, and Electrical Linewidths
ER  -