TY  - CONF
AU  - Durgapal, P.
AU  - Ehrstein, James
AU  - Nguyen, Nhan
C2  - Proc.,  1998 Conference, Gaithersburg, MD, USA
DA  - 1998-03-01 00:03:00
LA  - en
PB  - Proc.,  1998 Conference, Gaithersburg, MD, USA
PY  - 1998
TI  - Thin-Film Ellipsometry Metrology
ER  -