TY  - CONF
AU  - Park, J
AU  - Lee, J.
AU  - Venables, D.
AU  - Krause, S.
AU  - Roitman, Peter
C2  - Proc.,  Materials Research Society Symposium, Materials Synthesis and Processing Using Ion Beams, Boston, MA, USA
DA  - 1993-12-31 00:12:00
LA  - en
M1  - 279
PB  - Proc.,  Materials Research Society Symposium, Materials Synthesis and Processing Using Ion Beams, Boston, MA, USA
PY  - 1993
TI  - Role of Oxygen Precipitation Processes in Defect Formation and Evolution in Oxygen Implanted Silicon-on-Insulator
ER  -