TY  - JOUR
AU  - Chiaramonti, Ann
AU  - Vollebregt, Sten
AU  - van, Johan
AU  - Beenakker, Kees
AU  - Ishihara, R.
C2  - Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers
DA  - 2013-03-21
LA  - en
PB  - Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers
PY  - 2013
TI  - Towards the Integration of Carbon Nanotubes as Vias in Monolithic 3D Integrated Circuits
ER  -