TY  - CONF
AU  - Kelly, T
AU  - Gribb, T
AU  - Martens, R
AU  - Larson, D
AU  - Tabat, N
AU  - Matyi, R
AU  - Shaffner, Thomas
C2  - Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
DA  - 2001-02-01 00:02:00
LA  - en
PB  - Characterization and Metrology for ULSI Technology, Gaithersburg, MD, USA
PY  - 2001
TI  - Local Electrode Atom Probes: Prospects for 3D Atomic-Scale Metrology Applications in the Semiconductor and Data Storage Industries
ER  -