TY - JOUR AU - Moffat, T AU - Wheeler, D AU - Edelstein, Monica AU - Josell, D C2 - Ibm Journal of Research and Development DA - 2005-01-01 00:01:00 LA - en M1 - 49 PB - Ibm Journal of Research and Development PY - 2005 TI - Superconformal Film Growth: Mechanism and Quantification ER -