TY  - JOUR
AU  - Hilton, Gene
AU  - Beall, James
AU  - Deiker, Steven
AU  - Vale, Leila
AU  - Doriese, W.Bertrand
AU  - Beyer, Joern
AU  - Ullom, Joel
AU  - Reintsema, Carl
AU  - Xu, Yizi
AU  - Irwin, Kent
C2  - Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment
DA  - 2004-03-01 00:03:00
LA  - en
M1  - 520
PB  - Nuclear Instruments & Methods in Physics Research Section A-Accelerators Spectrometers Detectors and Associated Equipment
PY  - 2004
TI  - X-ray Microcalorimeter Arrays Fabricated by Surface Micromachining
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31414
ER  -