TY  - JOUR
AU  - Jach, Terrence
AU  - Dura, Joseph
AU  - Nguyen, Nhan
AU  - Swider, J
AU  - Cappello, G
AU  - Richter, Curt
C2  - Surface and Interface Analysis
DA  - 2004-01-01 00:01:00
LA  - en
M1  - 36
PB  - Surface and Interface Analysis
PY  - 2004
TI  - Comparative Thickness Measurements of SiO<sub>2</sub>/Si Films for Thicknesses Less than 10 nm
ER  -